ISSN 0004-881X

Investigation into Nanosecond-Laser Drilling of Alumina Ceramics Using Three-Dimensional Model

by C. Y. Ho^1*, M. Y. Wen², Y.-H. Tsai¹

1. Department of Mechanical Engineering, Hwa Hsia Institute of Technology, Taipei 235, Taiwan
2. Department of Mechanical Engineering, Cheng Shiu University, Taiwan, Kaohsiung 833, Taiwan

Abstract

Laser drilling of alumina ceramics is analytically investigated in this paper. The drilling of workpiece is performed using a TEM00 10ns pulse Nd:YAG laser. Considering the absorption of plasma plume and the phase transition from solid to vapor without melting, a three-dimensional thermal model is developed and utilized to analyze the etch depth per pulse and geometric shape during drilling process. Etch depth per laser pulse calculated by this work is also compared with the available experimental data.

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